Publication | Open Access
Sensitive capacitive pressure sensors based on graphene membrane arrays
Makars Šiškins,
Martin Lee,
Dominique Wehenkel,
Richard M. van Rijn,
Tijmen W. de Jong,
Johannes R. Renshof,
Berend C. Hopman,
Willemijn S. J. M. Peters,
Dejan Davidovikj,
Herre S. J. van der Zant,
Microsystems & Nanoengineering