Publication | Closed Access
Chemical vapor deposition of clean and pure MoS<sub>2</sub> crystals by the inhibition of MoO<sub>3−x</sub> intermediates
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Citations
36
References
2020
Year
Materials EngineeringInorganic ChemistryMaterials ScienceEngineeringCrystal Growth TechnologyOxide ElectronicsSurface ScienceApplied PhysicsDifferent Cvd ProductsChemistryChemical DepositionCrystallographyChemical Vapor DepositionChemical VaporHigh Sulfur Supersaturation
A sublimated sulfur vapor <italic>versus</italic> evaporated MoO<sub>3</sub> vapor with transition from low to high sulfur supersaturation would cause different CVD products transformed from MoS<sub>2</sub>–MoO<sub>3−x</sub> composites to clean and pure MoS<sub>2</sub> crystals accordingly.
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