Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers

Rozita Rouzbahani, Shannon S. Nicley, Danny E. P. Vanpoucke, Fernando Lloret, Paulius Pobedinskas, D. Araújo, Ken Haenen

Carbon · 2020 · 44 citations · 80 references

Concepts

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