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A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere

Materials ScienceThermal Spray CoatingChemical EngineeringEngineeringCorrosionThermal Barrier CoatingSurface ScienceDifferent PropertiesThin FilmsComparative AnalysisChemical Vapor DepositionThin Film ProcessingNitrogen Gas Atmosphere