Publication | Closed Access
Modulation of Si on microstructure and tribo-mechanical properties of hydrogen-free DLC films prepared by magnetron sputtering
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Citations
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References
2020
Year
Materials ScienceMaterials EngineeringHydrogen-free Dlc FilmsEngineeringPhysicsSurface ScienceApplied PhysicsTribo-mechanical PropertiesMagnetron SputteringThin FilmsSilicon On InsulatorMicroelectronicsChemical Vapor DepositionThin Film Processing
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