Publication | Closed Access
15‐1: <i>Invited Paper:</i> Manufacturing Technology of LTPO TFT
33
Citations
11
References
2020
Year
Materials ScienceElectrical EngineeringEngineeringOxide ElectronicsApplied PhysicsLtpo TftMaterial InnovationThin Film MaterialsSemiconductor Device FabricationMaterial PerformanceThin Film DevicesThin Film Process TechnologyThin FilmsApple WatchMicroelectronicsThin Film ProcessingSemiconductor DeviceLtpo Tfts
Low‐Temperature Poly‐Si and Oxide (LTPO) thin‐film transistors (TFTs) have been successfully manufactured and the AMOLED panels with LTPO TFTs are adapted to Apple Watch. The manufacturing technology of LTPO TFT such as stack‐up structure, device characteristics, panel image quality with LRR driving, and degradation of reliability in oxide TFT is explained and discussed.
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