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Comparison of passivation properties of plasma-assisted ALD and APCVD deposited Al2O3 with SiNx capping

DOIFull Paper Access

16

Citations

31

References

2020

Year

Keeya Madani, A. Rohatgi, Kwan Hong Min, Hee‐eun Song, Ying-Yuan Huang, Ajay Upadhyaya, Vijaykumar Upadhyaya, Brian Rounsaville, Young‐Woo Ok
Solar Energy Materials and Solar Cells

References

YearCitations

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