Publication | Open Access
Hot target magnetron sputtering process: Effect of infrared radiation on the deposition of titanium and titanium oxide thin films
33
Citations
52
References
2020
Year
Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsInfrared RadiationThin FilmsPulsed Laser DepositionHot Target MagnetronChemical DepositionChemical Vapor DepositionThin Film Processing
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