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Microstructure and mechanical properties of (AlCrTiZrV)Nx high-entropy alloy nitride films by reactive magnetron sputtering

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringMechanical PropertiesNx High-entropy AlloyApplied PhysicsAlloy PhaseMultiprincipal Element AlloyMicrostructureReactive Magnetron Sputtering