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Effects of nitrilotriacetic acid and corrosion inhibitor on cobalt barrier chemical–mechanical polishing: Experimental and density functional theory analysis

Materials ScienceChemical EngineeringCorrosion ProtectionEngineeringCorrosionSurface ScienceNitrilotriacetic AcidSurface TreatmentChemistryCorrosion InhibitorCorrosion ResistanceCorrosion Inhibition