Die Struktur epitaktisch aufgedampfter Goldfilme

Abstract

Abstract The texture of 400 Å thick gold films was investigated by plotting the intensities obtained with the help of a texture analyser in a pole figure diagramm. The films had been evaporated under UHV conditions on (111)-, (110)-and (100)-oriented silicon substrates. The gold films always show a preferred (111)-orientation. This preferred orientation, however, may manifest itself in a (111) fibre texture or a single crystal structure due to different orientation and heating pretreatment of the substrate. Quantitative statements are given on crystal misorienta-tion and azimuthal alignment. The sixfold symmetry of the pole figures can be traced back to the influence of twin stacking faults.