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Spectroscopic ellipsometry study of non-hydrogenated fully amorphous silicon films deposited by room-temperature radio-frequency magnetron sputtering on glass: Influence of the argon pressure

Materials ScienceEngineeringSurface ScienceApplied PhysicsArgon PressureSpectroscopic Ellipsometry StudyAmorphous SolidSilicon On InsulatorMicroelectronicsThin Film ProcessingAmorphous Silicon Films