Publication | Closed Access
High‐Performance Phosphorene‐Based Transistors Using a Novel Exfoliation‐Free Direct Crystallization on Silicon Substrates
16
Citations
38
References
2020
Year
Optical MaterialsEngineeringRed PhosphorusLaser ApplicationsLaser MaterialSilicon SubstratesOptoelectronic DevicesChemistrySilicon On InsulatorSemiconductor NanostructuresPhosphoreneMaterials ScienceSemiconductor TechnologyNanotechnologyOptoelectronic MaterialsSemiconductor Device FabricationElectronic MaterialsMechanical ExfoliationApplied PhysicsField‐effect TransistorsFunctional Materials
Abstract Phosphorene is one of the most promising elemental 2D materials. So far, mechanical exfoliation is the main route toward the formation of phosphorene sheets. Although field‐effect transistors are realized on phosphorene, their arrangement and size are dictated by the randomness of the exfoliation and transfer methods. Here, the evolution of highly crystalline and large‐area phosphorene sheets with a laser‐assisted phase transition from red phosphorus directly on silicon substrates in desired locations is reported. The original red phosphorus can be patterned prior to laser‐assisted crystallization to achieve the desired shape, location, and layer thickness (either mono or few). A 1064 nm laser is employed as the source to impart energy onto the red phosphorus layer and to achieve allotrope transformation. A combination of argon–oxygen (Ar:O 2 ) and helium–hydrogen (He:H 2 ) gases is exploited in a sequential manner to lead to phosphorene sheets. Various techniques are used to examine the physical properties of phosphorene sheets. Field‐effect transistors are made at different phases of crystallization and a high field‐effect mobility of 1450 cm 2 V −1 s −1 and on/off ratio of 10 3 are achieved. Moreover, the optoelectrical characteristics of the phosphorene‐based phototransistors under different illumination powers and back‐gate voltages are investigated, showing superior performance.
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