A unified model for electrostatic sensors in fluid media

Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope

John E. Sader · Journal of Applied Physics · 1998 · 1.4K citations

Engineering, Mechanical Engineering, Physics +16

<i>Fundamentals of Vibrations</i>

L. Meirovitch, RG Parker · Applied Mechanics Reviews · 2001 · 1.2K citations

Engineering, Mechanical Engineering, Physics +17

Characterization of the mechanical behavior of an electrically actuated microbeam

Eihab Abdel‐Rahman, Mohamed I Younis, Ali H. Nayfeh · Journal of Micromechanics and Microengineering · 2002 · 463 citations

Engineering, Mechanical Engineering, Actuators +16

On Isothermal Squeeze Films

J. J. Blech · Journal of Lubrication Technology · 1983 · 359 citations

Natural Sciences, Materials Science, Electronic Materials +9

Squeeze-film damping in solid-state accelerometers

J. B. Starr · 1990 · 278 citations

Computing, Mechanical Engineering, Finite Element Analysis +13