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Numerical and experimental investigation on ductile deformation and subsurface defects of monocrystalline silicon during nano-scratching

Materials ScienceEngineeringSilicon On InsulatorMechanical EngineeringSurface ScienceApplied PhysicsDuctile DeformationSubsurface DefectsNanoscale ModelingSolid MechanicsDefect FormationSemiconductor Device FabricationPlasticityMonocrystalline SiliconMechanics Of MaterialsMicrostructureSilicon Debugging