Surface Degradation Mechanism on CH3NH3PbBr3 Hybrid Perovskite Single Crystal by a Grazing E-Beam Irradiation

Abstract

To start a step such as some realization of minimized and integrated devices, it requires simply understanding the surface status of hybrid perovskite on the e-beam irradiation because many commercial semiconductor devices are performed with a surface patterning process using e-beam or etching gas. The surface status of CH₃NH₃PbBr₃ (MAPbBr₃) single crystal was studied after a grazing e-beam irradiation in an ultra-high vacuum. The prepared hybrid perovskite single crystal was irradiated by the 3 degree-grazing e-beam with energy of 15 kV for 10 min using a reflection high-electron energy diffraction technique. The e-beam irradiation on the MAPbBr₃ hybrid perovskite single crystal induced the deformation from MAPbBr₃ into MABr, Br₂, and Pb on the surface. The gas phases of MABr and Br₂ are depleted from the surface and the Pb element has remained on the surface. As a result of the e-beam irradiation, it formed a polycrystalline-like phase and Pb metal particles on the surface, respectively.