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Microstructure, hardness and optical properties of Er2O3 films deposited on diamond-coated and Si(100) substrates by radio frequency magnetron sputtering

Materials EngineeringMaterials ScienceDiamond-like CarbonOptical MaterialsEngineeringOptical PropertiesOxide ElectronicsSurface ScienceApplied PhysicsRadio Frequency MagnetronThin FilmsEpitaxial GrowthThin Film ProcessingEr2o3 Films