Effect of magnetron sputtering parameters on dielectric properties of PTFE foil

Abstract

In this paper, a modification of magnetron sputtering for the deposition of measuring electrodes on polytetrafluoroethylene foil is described. An influence of ejection frequency of the working gas on volume resistivity, surface resistivity, relative permittivity and dielectric loss factor is reported. An effect of aging temperature on some of the material parameters is observed.