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Effect of RF sputtering power and vacuum annealing on the properties of AZO thin films prepared from ceramic target in confocal configuration

DOIFull Paper Access

65

Citations

24

References

2020

Year

Fatiha Challali, Djelloul Mendil, Tahar Touam, Thierry Chauveau, Valérie Bockelée, Alexis Garcia Sanchez, A. Chelouche, Marie‐Paule Besland
Materials Science in Semiconductor Processing

References

YearCitations

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