Materials Science in Semiconductor Processing · 2020 · 29 citations · 22 references
Natural SciencesMaterials SciencePhysicsComputational Materials ScienceNanotechnologySurface ScienceMolecular DynamicsMolecular SimulationNanostructured SurfacesSemiconductor SurfacesSurface CrystallographySurface PhysicsComputational NanotechnologyMolecular Dynamics Of MaterialsMolecular Simulation AlgorithmsMolecular Simulation AnalysisSilicon Surface ScienceSingle-crystal SiliconSurface Simulations
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