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Wafer-scale 4H-silicon carbide-on-insulator (4H–SiCOI) platform for nonlinear integrated optical devices

PhotonicsElectrical EngineeringElectronic DevicesOptical MaterialsEngineeringWafer Scale ProcessingApplied PhysicsSemiconductor Device FabricationOptoelectronic DevicesIntegrated CircuitsPhotonic Integrated CircuitSilicon On InsulatorMicroelectronicsPhotonic DeviceOptoelectronicsWafer-scale 4H-silicon Carbide-on-insulator