Concepedia

Publication | Closed Access

Study on the polishing mechanism of pH-dependent tribochemical removal in CMP of CaF2 crystal

DOI

18

Citations

40

References

2020

Year

Jie Guo, Jian Gong, Pengfei Shi, Chen Xiao, Liang Jiang, Lei Chen, Linmao Qian
Tribology International

References

YearCitations

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