Publication | Closed Access
Modification of a-C:H films via nitrogen and silicon doping: The way to the superlubricity in moisture atmosphere
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Citations
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References
2020
Year
Materials ScienceChemical EngineeringEngineeringMoisture AtmosphereSurface ScienceSilicon DopingApplied PhysicsVacuum DeviceH FilmsChemical Vapor DepositionThin Film Processing
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