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Fabrication of tungsten nitride thin films by superimposed HiPIMS and MF system: Effects of nitrogen flow rate

Materials ScienceMaterials EngineeringChemical EngineeringMf SystemEngineeringSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsChemical Vapor DepositionThin Film ProcessingNitrogen Flow RateSuperimposed Hipims