Coatings · 2020 · 14 citations · 13 references
EngineeringMaterials EngineeringMaterials SciencePhotonicsSensorsThin FilmsFiber OpticsOptical FibersOptical Thin FilmsPressure MeasurementPressure SensorsThin Film Optical PropertiesFabry-perot ResonatorsFiber-optic Pressure SensorsFilm ThicknessMicrofabricated SensorsOptical Pressure SensingOptical Pressure SensorsSiliconThin-film Pressure Sensors
A pressure-assisted arc discharge method of preparing silicon microbubbles with a glass tube was utilized for decreasing the bubble film’s thickness and improving the bubble’s uniformity. By controlling the arc discharge intensity, discharge time and the position of the fiber carefully, the thickness of the microbubble film was reduced to the micrometer scale. Later, the thin film of the microbubble was transferred to the end the single-mode-fiber/glass-tube structure, for forming the FP (Fabry–Perot) interference cavity. As the thin film is sensitive to the outer pressure, such a configuration could be used for a high-sensitive-pressure measurement. Experimental results show that the sensitivity of this FP (Fabry–Perot) cavity was 6790 pm/MPa when the outer pressure ranges from 100 to 1600 kPa, and the relationship between the structural parameters of the thin film and the outer pressure was theoretically analyzed. Moreover, this special structure made of the end silicon film microbubble is more suitable for high-sensitivity applications.
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High-sensitivity fiber-tip pressure sensor with graphene diaphragm
Jun Ma, Wei Jin, Hoi Lut Ho et al. · Optics Letters · 2012 · 307 citations · Full text
High Q silica microbubble resonators fabricated by arc discharge
Simone Berneschi, Daniele Farnesi, F. Cosi et al. · Optics Letters · 2011 · 128 citations
Fiber-tip gas pressure sensor based on dual capillaries
Ben Xu, Chao Wang, D. N. Wang et al. · Optics Express · 2015 · 104 citations · Full text
Engineering, Bioengineering, Microelectromechanical Systems +16