Publication | Closed Access
The structural evolution of light-ion implanted 6H-SiC single crystal: Comparison of the effect of helium and hydrogen
100
Citations
64
References
2020
Year
Materials ScienceIon ImplantationEngineeringPhysicsCrystalline Defects6H-sic Single CrystalApplied PhysicsStructural EvolutionCarbide
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