Concepedia

Publication | Open Access

Near-field sub-diffraction photolithography with an elastomeric photomask

DOIFull Paper Access

69

Citations

50

References

2020

Year

Sangyoon Paik, Gwangmook Kim, Sehwan Chang, Sooun Lee, Dana Jin, Kwang-Yong Jeong, I. Sak Lee, Jekwan Lee, Hongjae Moon, Jaejun Lee,
Nature Communications

References

YearCitations

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