Deposition of Tungsten Thin Films by Magnetron Sputtering for Large-Scale Production of Tungsten-Based Transition-Edge Sensors - Concepedia

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Deposition of Tungsten Thin Films by Magnetron Sputtering for Large-Scale Production of Tungsten-Based Transition-Edge Sensors

DOI Full Paper Access

15

Citations

15

References

2020

Year

A. H. Abdelhameed, G. Angloher, A. Bento, E. Bertoldo, L. Canonica, D. Fuchs, D. Hauff, N. Ferreiro Iachellini, M. Mancuso, F. Petricca,

Journal of Low Temperature Physics

References

	Year	Citations

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