A high growth rate process of ALD CeOx with amidinato-cerium [(N-iPr-AMD)3Ce] and O3 as precursors

Liyong Du, Keyan Wang, Yinpeng Zhong, Bing Liu, Xinfang Liu, Yuqiang Ding

Journal of Materials Science · 2020 · 12 citations · 64 references

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