Microsystem Technologies · 2020 · 55 citations · 15 references
EngineeringMechanical EngineeringMechatronics EngineeringInstrumentationMicroelectromechanical SystemsSensorsMems ActuatorsMems DesignMems FabricationMems SensorsMems SimulationMicroelectromechanical SensorsAccelerometer SensorsAccelerometersMems CalibrationMems Mechanical SensorsMems Metrology
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Applications of cavity optomechanics
Michael Metcalfe · Applied Physics Reviews · 2014 · 270 citations
High-sensitivity fiber-optic accelerometer
Awad S. Gerges, T.P. Newson, J.D.C. Jones et al. · Optics Letters · 1989 · 84 citations
Kazem Zandi, Joseph André Belanger, Yves-Alain Peter · Journal of Microelectromechanical Systems · 2012 · 73 citations
Engineering, Electrical Engineering, Mechanical Engineering +17
Optomechanical reference accelerometer
Metrologia · 2015 · 60 citations · Full text
Engineering, Electrical Engineering, Mechanical Engineering +17