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Microstructure and properties of TiAlSiN ultra-hard coatings prepared by plasma immersion ion implantation and deposition with TiAlSi alloy cathodes

Materials ScienceMaterials EngineeringTialsi Alloy CathodesIon ImplantationEngineeringCorrosionSurface ScienceApplied PhysicsMulti-functional CoatingSurface ProcessingPlasma ProcessingTialsin Ultra-hard Coatings