Publication | Open Access

Investigation of dispersion parameters, dielectric properties and opto–electrical parameters of ZnO thin film grown by ALD

Materials ScienceDielectric PropertiesElectrical EngineeringOptical MaterialsDispersion ParametersEngineeringOptical PropertiesOxide ElectronicsOptoelectronic MaterialsApplied PhysicsOptoelectronic DevicesThin Film Process TechnologyZno Thin FilmThin FilmsOptoelectronicsThin Film Processing