A 0.34-571nW All-Dynamic Versatile Sensor Interface for Temperature, Capacitance, and Resistance Sensing

Abstract

A highly versatile all-dynamic sensor interface is proposed. It supports temperature/capacitance/resistance sensing with (a) adaptive power vs speed and resolution, (b) a configurable signal range, and (c) the ability for time-interleaved multimodal recording. State-of-the-art Figure-of-Merits (FoMs) are achieved of 0.82pJ•C <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , 31fJ/c.-step, and 124fJ/c.-step, for temperature, capacitance and resistance sensing, respectively, with a minimum power consumption of 0.34nW and a chip area of 0.084mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> in 65nm CMOS. Multimodal sensing is demonstrated in real time, showing that this chip can measure temperature, acceleration (with a capacitive sensor) and pH (with a resistive sensor) together with only 1.4nW of power consumption.