Publication | Closed Access
Effect of crystallinity of ceria particles on the PETEOS removal rate in chemical mechanical polishing for shallow trench isolation
11
Citations
0
References
2002
Year
Materials ScienceMaterials EngineeringChemical EngineeringEngineeringCeria ParticlesCorrosionSeparation TechnologyRecyclingShallow Trench IsolationSurface TreatmentPeteos Removal RateMineral Processing
No additional data available for this publication yet. Check back later!