Highly porous carbon films fabricated by magnetron plasma enhanced chemical vapor deposition: Structure, properties and implementation

O. M. Slobodian, A.V. Rusavsky, A. V. Vasin, O.Yu. Khyzhun, O. Gudymenko, V.P. Kladko, B.I. Tsykaniuk, P. M. Lytvyn, Y. V. Gomeniuk, Olena Fesenko,

Applied Surface Science · 2019 · 11 citations · 43 references

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