Ultrahigh-Sensitivity Microwave Sensor for Microfluidic Complex Permittivity Measurement

Abstract

The conventional resonant-type microwave microfluidic sensors made of planar resonators suffer from limited sensitivities. This is due to the existence of several distributed capacitors in their structure, where just one of them acts as a sensing element. This article proposes a very high-sensitivity microwave sensor made of a microstrip transmission line loaded with a shunt-connected series LC resonator. A large sensitivity for dielectric loadings is achieved by incorporating just one capacitor in the resonator structure. Applying sample liquids to the microfluidic channel implemented in the capacitive gap area of the sensor modifies the capacitor value. This is translated to a resonance frequency shift from which the liquid sample is characterized. The sensor performance and working principle are described through a circuit model analysis. Finally, a device prototype is fabricated, and experimental measurements using water/ethanol solutions are presented for verification of the sensing principle.