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Mechanical modification and damage mechanism evolution of TiN films subjected to cyclic nano-impact by adjusting N/Ti ratios

Materials EngineeringMaterials ScienceMechanical ModificationDamage Mechanism EvolutionEngineeringSevere Plastic DeformationNanotechnologyMechanical EngineeringN/ti RatiosSolid MechanicsMicrostructure-strength RelationshipDamage EvolutionThin Film ProcessingMicrostructure