Publication | Closed Access
Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films
23
Citations
46
References
2019
Year
Materials ScienceAdvanced Laser ProcessingExtraordinary Synergetic EffectEngineeringApplied PhysicsLaser MaterialLaser Cvd DepositionSibcn FilmsLaser-assisted DepositionPulsed Laser DepositionChemical Vapor Deposition
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