Journal of Electronic Materials · 2019 · 40 citations · 23 references
EngineeringMechanical EngineeringAcousticsMicroelectromechanical SystemsSensorsPiezoelectric ActuationPiezoelectric ActuatorsPiezoelectric MaterialsTransducer PrinciplesTransducer TechnologyVibration ControlPiezoelectric Transducer DesignPiezoelectric TransducersTransducer FabricationTransducer MaterialsTransducer Sensitivity
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