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A data-driven approach to selection of critical process steps in the semiconductor manufacturing process considering missing and imbalanced data

EngineeringData ScienceIndustrial EngineeringProcess MonitoringProcess ControlManufacturing PlanningBusinessProcess AnalysisProcess PlanningSemiconductor Manufacturing ProcessIndustrial InformaticsProcess OptimizationStatisticsQuantitative ManagementCritical Process StepsData-driven ApproachOperations Research