Publication | Closed Access
1.55-μm Lasers Epitaxially Grown on Silicon
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Citations
60
References
2019
Year
Device Component IntegrationOptical MaterialsEngineeringLaser ScienceOptoelectronic DevicesIntegrated CircuitsSilicon On InsulatorSemiconductorsElectronic DevicesPhotonic Integrated CircuitInp-based 1.55-μM LasersMolecular Beam EpitaxyCompound SemiconductorPhotonicsElectrical EngineeringPhotonics IntegrationOptoelectronic MaterialsSemiconductor Device FabricationApplied PhysicsOptoelectronics
We have developed InP-based 1.55-μm lasers epitaxially grown on (001) Si substrates for photonics integration. To overcome the fundamental material challenges associated with mismatch III-V on Si hetero-epitaxy, a Si V-groove epitaxy platform was established, leading to device quality III-V nanostructures and thin films. Combining metal organic chemical vapor deposition grown 1.55-μm InAs quantum dots (QDs) and the InP/Si thin-film templates, we have achieved electrically driven 1.55-μm QD lasers on Si operating at room temperature. To reduce device footprint and energy consumption, a bufferless integration path by growing InP nano-ridge lasers on prepatterned silicon-on-insulators wafers has been explored. Material and device characterizations and an outlook for device component integration are discussed.
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