Publication | Closed Access
Oxidation behaviour of TiSiN(Ag) films deposited by high power impulse magnetron sputtering
18
Citations
33
References
2019
Year
Materials ScienceMaterials EngineeringEngineeringOxidation BehaviourNanotechnologySurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsThin Film Processing
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