Publication | Closed Access
The effects of annealing and wake-up cycling on the ferroelectricity of zirconium hafnium oxide ultrathin films prepared by remote plasma atomic layer deposition
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Citations
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References
2019
Year
The effects of annealing and wake-up cycling on the ferroelectricity of zirconium hafnium oxide ultrathin films prepared by remote plasma atomic layer deposition, Hsu, Tzu-Yao, Kuo, Chin-Lung, Lin, Bo-Ting, Shieh, Jay, Chen, Miin-Jang
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