Dispersion-Engineered Guided-Wave Resonators in Anisotropic Single-Crystal Substrates—Part II: Numerical and Experimental Characterization

Abstract

In this part of the paper, numerical and experimental verification of the analytical design procedure is presented. Various waveguide-based test-vehicles, implemented in single crystal silicon and transduced by thin aluminum nitride films, are demonstrated. Silicon resonators with type-I and type-II dispersion characteristics are presented to experimentally verify the analytical mode synthesis technique for realization of high quality-factor silicon Lamb wave resonators.