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Observations of the initial stages on reactive gas-timing sputtered TaO thin films by dynamic in situ spectroscopic ellipsometery

Materials ScienceReactive Gas-timingIi-vi SemiconductorEngineeringPhysicsTao Thin FilmsSurface ScienceApplied PhysicsSitu Spectroscopic EllipsometeryThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing