Materials Science in Semiconductor Processing · 2019 · 17 citations · 41 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistrySurface ScienceInorganic MaterialsInorganic SynthesisMetal Oxide NanomaterialsMetal OxidesMetalsOxide SemiconductorsAntimony ChemistryElectrical PropertiesElectrical Properties AnalysisOxide DopingOxide Solid-state ChemistryTin OxidesTitanium Oxides
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