Effects of ion irradiation on the structural and electrical properties of HfO2/SiON/Si p-metal oxide semiconductor capacitors - Concepedia

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Effects of ion irradiation on the structural and electrical properties of HfO2/SiON/Si p-metal oxide semiconductor capacitors

10

Citations

38

References

2019

Year

N. Manikanthababu, V. Saikiran, T. Basu, K. Prajna, Saumitra Vajandar, A. P. Pathak, B.K. Panigrahi, T. Osipowicz, S. Venugopal Rao

Thin Solid Films

Materials ScienceElectrical EngineeringIon ImplantationEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsSilicon On InsulatorMicroelectronicsElectrical PropertiesIon IrradiationSemiconductor Device

References

	Year	Citations

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