Eight-Channel Silicon-Photonic Wavelength Division Multiplexer With 17 GHz Spacing

Abstract

Dense wavelength division multiplexers are key components of data communication networks. This paper presents a silicon-photonic eight-channel multiplexer device with a channel spacing of only 0.133 nm (17 GHz). Devices were fabricated in a commercial silicon foundry, in 8" silicon-on-insulator wafers. The device layout consists of seven unbalanced Mach-Zehnder interferometers in a cascaded tree topology, and each interferometer unit also includes a nested ring resonator element. The transfer function of each unit is that of a maximally flat, auto-regressive, moving-average filter. The devices are characterized by uniform passbands, sharp spectral transitions between pass and stop bands, and strong out-of-band rejection. The worst-case optical power crosstalk is -22 dB. The proper function of the device requires careful control of optical phase delays over 14 distinct optical paths. Post-fabrication trimming of phase delays was performed through local illumination of a photo-sensitive upper cladding layer of chalcogenide glass. The de-multiplexing of three adjacent QAM-16, 40 Gbit/s wavelength-division channels was successfully demonstrated. The devices are applicable in data communication and in integrated-photonic processing of radio-over-fiber waveforms.