Chemical Vapor Deposition of Phase‐Pure Uranium Dioxide Thin Films from Uranium(IV) Amidate Precursors

Abstract

Homoleptic uranium(IV) amidate complexes have been synthesized and applied as single-source molecular precursors for the chemical vapor deposition of UO₂ thin films. These precursors decompose by alkene elimination to give highly crystalline phase-pure UO₂ films with an unusual branched heterostructure.