Ag Additive and Nanorod Structure Enhanced Gas Sensing Properties of Metal Oxide-Based CO₂ Sensor

Abstract

Carbon dioxide (CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ) gas sensor with a silver additive and nanorod structure is studied. The tandem p-i-n diodes with the silver additive are fabricated on silicon nanorods substrate. Nanorod structure provides a higher surface-to-volume ratio and more surface area for sensing reaction. The Ag additive modulates the sensing material characteristics and leads the developed device to have a high response of 2185% to 3000 ppm CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> gas. The tandem p-i-n diodes have superior characteristics to CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> gas including fast response time. Combining the two features of device fabrication, the sensor has potential for high-performance CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> sensing applications.